About the Centre
The centre provides the facilities for R&D work in the area of IC design and nanofabrication for staff and students. The prime objective of this Centre is to be the focal point for all R&D activities related to Microelectronics, MEMS, PV cell and Display technologies.
Its mission is to collaborate with industry and academic/research institutes in joint R&D projects involving staff/students and improve staff competencies in the area of IC design & nanofabrication.
The Nanofabrication lab is located in T12A203 (Block 12) and IC Design lab in T12401-02. It comprises a 450-square metre cleanroom of class 100 & class 1000 and houses the facilities for designing, fabrication and testing of microelectronic, MEMS, PV cell and display devices. The IC design lab houses workstations with IC design software.
Capabilities and Technical Services
The centre provides the facilities and has the processing capabilities for microelectronics, PV cell (crystalline silicon and polymer), MEMS and display technologies. We also offer consultancy work in the area of IC design, nanofabrication and characterisation.
The centre provides the following:
- Software packages - IC Design, process simulation and MEMS (Conventor)
- Process capability for photolithography, thin film deposition processes, wet and dry etching processes, wafer bonder, PECVD for carbon nanotubes, thermal diffusion/oxidation, screen printing, etc
- Profiling capability - contact and non-contact profilers, SEM, FESEM, AFM, LSM, microscopes, etc
- Direct mask writing equipment and development
- Characterization and testing stations - probing station with IV/CV measurement, 4-point probe, PV cell tester, spectrometer, etc
Project Showcase
Custom IC/FPGA-based design:
- Kitchen Timer
- Car Park Controller
- Microcontroller core
- Communication router
- Sensor control circuit
- Waveform Generator
- Robotic Soccer Image Processor
- Serial Communication Protocol
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MEMS/Clean Energy/Display Devices:
- Carbon Nanotube (CNT) applications
- PV cell (crystalline silicon and polymer)
- Micro-fuel cell
- MEMS-Based Pressure Sensor
- MEMS-based Micro-assay chip
- Micro Opto-fluidic devices (switch, lens)
- Micro-pump, micro-valve and micro-mixer
- Micro-mirror
- Micro-fluidic device for flow rectification control
- Nano-litre actuator
- Di-electrophoretic chip
- Micro-actuators for Magnetic Heads in Disk Drive
- Micro-grippers
- OLED
- Energy Harvester
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Collaboration
The centre has worked with the following partners:
- Nanyang Technological University (NTU)
- National University of Singapore(NUS)
- Defence Science Organisation (DSO)
- A*Star institutions
Courses and Seminars
The centre conducts courses and seminars in the following areas:
- Specialist Manpower Program for wafer fabrication training
- IDEMA courses for disk drive industry
- Clean room; micro contamination control
- Micro-fabrication processes
- IC Design
Contact Information
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Ms Cassandra Low Lee Ngo Technology Cluster Leader, School of Electrical and Electronic Engineering Email: lowln@sp.edu.sg Phone: 6772 1247 Fax: 6772 1974 |
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